Used ASYST IsoPort #293793872 for sale

ASYST IsoPort is a wafer handler designed to move semiconductor wafers through the isolation stages required in semiconductor fabrication processes. It features a dielectric barrier with integrated pressure sensors that allow the wafer to remain in position throughout the entire isolation process. IsoPort is designed to provide precision isolation with an impressive repeatability of +/- 1.5°C and a movement resolution of 0.1°C. The wafer handler is equipped with a pneumatically powered, full range of motion arm for positioning of the wafer through the isolation steps. ASYST IsoPort also features a custom-designed Active Heat Balance system that allows for precise temperature control and uniform heating/cooling of the wafer throughout its isolation process. Moreover, IsoPort offers extraordinary reliability and is capable of operating in extreme conditions such as high energy deposition and wide thermal gradients. Additionally, the wafer handler is compatible with all existing semiconductor process equipment and offers compatibility with ozone and high-throughput process chambers. With its advanced features, ASYST IsoPort provides optimal results and exceptional performance in the fabrication of state-of-the-art semiconductor devices.