Used ASYST IsoPort #9255526 for sale

ASYST IsoPort is an automated wafer handler designed to quickly and precisely move wafers between multiple wafer processing tools. It is an ideal solution for applications such as semiconductor manufacturing, MEMS device processing, and optical device processing. This wafer handler is based on a fully scalable, highly reliable platform built to deliver superior performance. It offers quick changeover between tools and process modules, while providing a robust environment for the highest quality results. IsoPort uses an X/Y axis position system with direct-drive technology to guarantee precision handling of wafers with a maximum of 200mm. The X/Y axis allows for faster wafer handing and changeovers, as well as automated movements around multiple stage positions including deep vertical Z movement for the removal and placement of wafers. Its integrated lift arm technology decreases cycle times due to the unit's high-speed head speed and is capable of carrying multiple wafers (up to 4) at the same time. The user interface includes an intuitive graphic user interface (GUI) to allow operators to customize and manage themselves. ASYST IsoPort offers remote service capability and diagnosis as a part of its system. IsoPort is designed with modular concepts allowing users to easily tailor configurations to meet the varying needs of each application. This wafer handler is also designed to provide maximum cleanroom compatibility with features such as a light curtain and passive ESD protection. ASYST IsoPort wafer handler is designed to maximize productivity by maximizing the number of wafers transferred between tools in the shortest time frame. It is also designed to minimize the time used in a cycle while providing precise results. Other features such as data logging of position and load parameters allow for detailed traceability. As safety is an important factor in any device handling process, IsoPort wafer handler has multiple fail-safe mechanisms such as automatic retrievability of wafers and dedicated filter systems for dust prevention. This wafer handler is built to work and perform in the toughest of environments and is sure to provide enhanced efficiency, faster processing and increased levels of cleanliness.