Used ASYST LPO 2200 #293630337 for sale

ASYST LPO 2200
Manufacturer
ASYST
Model
LPO 2200
ID: 293630337
Wafer handler.
ASYST LPO 2200 is a wafer handler for semiconductor wafer processing, designed to meet the stringent requirements of the most advanced semiconductor fabrication processes. This wafer handler has been designed to improve the process flow and throughput, while providing the utmost in equipment flexibility. LPO 2200 is capable of transferring wafers of up to twelve-inch diameters, with a maximum load capacity of up to 700 kilograms. The handler is equipped with a durable unitized double-lock structure, with dual high-precision guide rails and an integrated spring loaded wafer handling arm, making it extremely versatile in operation, as it can be easily adapted to accommodate different wafer sizes and shapes. ASYST LPO 2200 has an integrated control system, which provides for easy control of the wafer handling arm and provides for the delivery and receipt of data from external sources. The unit utilizes a proven servo technology, with high-precision encoder feedback, in order to ensure precise alignment of the wafer-handling arm in reference to the wafer surface. LPO 2200 includes an integrated wafer-leveling machine, which monitors the angle of the wafer being processed and guarantees a uniform alignment of the processed wafer at the device level. This level of control is critical for advanced processes, such as chemical mechanical planarization, as it guarantees that the processed surface remains uniform and non-slanted. The handler is also equipped with a thermal protection tool that guards against wafer overheating, due to prolonged exposure to high temperatures during the processing stages. The thermal protection asset is capable of reacting to changes in wafer temperature in milliseconds, in order to prevent any further damage to the wafer. Finally, ASYST LPO 2200 is equipped with an advanced vision model, which is designed to detect any possible discrepancies between the actual wafer position and the desired position of the wafer. This ensures that the initiated processes are correctly aligned with the wafer surface, and any risks of substandard process results is avoided. In conclusion, LPO 2200 is a high-performance wafer handler for semiconductor processing, capable of transferring wafers up to twelve-inch diameters, with a maximum load capacity of up to 700 kilograms. The unit is equipped with a durable double-lock structure and integrated control equipment, while the integrated thermal protection system and vision unit guarantee the highest levels of machine accuracy, quality and reliability.
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