Used ASYST LPT 2200 #9275212 for sale
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ASYST LPT 2200 is a wafer handler designed for precision fab automation in both HVM (High Volume Manufacturing) and R&D laboratories. It is a compact and compact wafer handler configured for 200mm or ≤ 150mm wafers (or ≤50mm squares) and provides precise, repeatable substrate motion. It features a unique suspension design which provides reliable motion response while reducing vibration and mechanical shock. ASYST LPT2200 is equipped with three main parts: the main frame, the Linear Positioning Table (LPT) and the wafer Stage. The main frame supports and provides structural integrity for the LPT, ensuring precise and repeatable operation in challenging production scenarios. The wafer Stage consists of a multi axis stage and enables fast and accurate wafer handling. The LPT consists of four main parts: a servo drive motor, a set of linear motorized rails to move the stage with high speed and accuracy, a roller table providing additional stability, and a flexure to reduce vibration and mechanical shock. The LPT is a key component of the equipment, and its design is optimized to ensure reliable motion response while minimizing vibration and mechanical shock. To further enhance its accuracy and performance, the LPT is driven with a high-resolution encoder. This enables precise control of position and speed, allowing the system to meet tight throughput requirements. The LPT is also equipped with advanced features such as a dedicated motion controller, stepper motor servos, and encoder support. These features, along with the use of powerful software and hardware, ensure efficient and smooth operation. LPT 2200 wafer handler also supports an array of sensors for monitoring the position and speed of the unit, thus enabling further optimization of its performance. In conclusion, LPT2200 is a reliable and advanced wafer handling machine perfect for precision fab automation. With its unique suspension design, advanced features and sensors, it is highly precise and repeatable, allowing it to meet tight throughput requirements. It is compact, efficient, and able to accommodate a wide range of substrate sizes for maximum versatility.
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