Used ASYST / PST 100 #27562 for sale
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ID: 27562
Wafer Size: 8"
Vintage: 1996
Wafer metrology sorters, 8"
(2) ASYST SMIF Indexers
Open cassette plate
Equip robot
Robot controller
Aligner / Controller
Upgraded end-effector
PC Controller
FT-LCD Display unit
Keyboard
Mouse / Trackball
1996 vintage.
ASYST / PST 100 Wafer Handler is a high-speed wafer handling equipment designed to efficiently move wafers from one process point to another in an automated semiconductor fabrication environment. The system is made up of an industrial grade motorized platform, a load port, a tool frame, and an electrical controller. The motorized platform is capable of 360 degree rotation, allowing for access to all axes of the unit. On the platform, the load port connects to the tool frame, providing a heavily shielded work space for processing wafers. The electrical controller facilitates automated communication between the motorized platform, the load port, and any other peripheral devices. The motorized platform uses efficient gearing to easily movable wafers from one location to another, while the load port provides a highly-shielded environment in which to prevent contamination and/or electrical interference. The platform has adjustable speeds ranging from 0 - 200 mm/s to accommodate all transfer needs. For example, high-speed transfers are possible when high-speed process steps are present, while slower speeds can be selected when delicate processes are necessary. The adjustable speed feature is a key element of PST 100, allowing users to customize the machine to their own processes. The tool frame of ASYST PST100 secured to the platform by a pair of locking clamps and includes a standard interface for a variety of end-effector devices. The frame is adjustable and easily configurable, allowing for multiple positions and device types. It also includes built in safety features, ensuring that wafers are always handled safely and securely. Additionally, PST100 includes an electrical controller, which integrates with the motorized platform, load port, and any other peripheral devices to facilitate automated communication. ASYST 100 is the perfect solution for high-throughput wafer processing. With its efficient speed and adjustable features, it is capable of handling any production line with ease. Its ability to be customized to a variety of process needs makes it highly compatible with existing manufacturing line systems. The tool is proven to be reliable when working with multiple wafers and can significantly reduce costs by eliminating manual handling. PST PST100 also utilizes advanced safety features, making it an ideal solution for efficient and safe wafer handling.
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