Used ASYST / PST SPARTAN #293652726 for sale

ASYST / PST SPARTAN is a wafer handler designed to support applications requiring high accuracy and reliability. PST SPARTAN is available in two variations separating the robot (motor-driven shuttle) and the handler (processing chamber, power, controls and sensors). This product range is suitable for a variety of processes and temperatures, ranging from low (<100C) to high (>400C), with a wide range of capabilities such as multi-step wafer loading and unloading, wafer sorting, and wafer backside cleaning. The design of ASYST SPARTAN wafer handler is compact and efficient. It features a stationary handler base and a flexible, modular design that is easy to upgrade and install. The modular hardware design allows for structural integrity and a long-term maintenance program, which provides a reliable, stable platform for wafer processing and handling. Also, its control architecture provides a robust integration of motion, process, and sensor subsystems, making it a suitable solution for applications requiring high levels of accuracy and repeatability during the process. SPARTAN wafer handler is highly capable of a wide range of substrates and sizes, including 300mm and 200mm wafers, as well as a variety of specialty substrates. It supports a variety of die handling operations such as die placement, pickup and sorting. This is achieved through the use of a vacuum equipment and its implementation of a wafer travel carousel platform. The system is designed to offer high accuracy and reliability, as it uses a closed-loop control unit that monitors the wafer's position in the shuttle and feedbacks to the handler base with high precision. Advanced safety features are available that help minimize the risk of harm to personnel and equipment. These safety features include limit switches, an e-stop button, and a three-dimensional position safety machine. ASYST / PST SPARTAN wafer handler is capable of a wide range of applications and is guaranteed to provide complete wafer processing support. Its features make it possible to handle a variety of substrates, sizes, and temperatures, as well as a stable wafer transport tool with repeatable accuracy and reliability. It is also simple to use and set up, making it a good choice for customers looking for high-quality, cost-efficient wafer handling systems.