Used ASYST / PST SPARTAN #293671321 for sale

ASYST / PST SPARTAN is a high-performance, multi-function wafer handling equipment designed for automated semiconductor, flat panel display, and other advanced technology applications. It is capable of handling a variety of wafer sizes and is designed with advanced features that provide high speed as well as precision and repeatability for advanced, high-volume applications. PST SPARTAN is composed of four main components: a host module, a carousel module, a front-end conveyor, and a back-end conveyor. The host module is responsible for the automation control and communication between the other modules of the system, and includes a programmable logic controller (PLC). The carousel module houses the storage of the wafers and is capable of accommodating up to 50 wafers at a time. The front-end conveyor moves wafers quickly and accurately, with sensors that detect potential jamming, while the back-end conveyor is designed to unload the wafers at a rate of up to 600 wafers per hour. ASYST SPARTAN is equipped with a number of advanced features that enable rapid wafer handling. An integrated vision unit allows for real-time wafer manipulation and guidance on the front-end conveyor while customized vision inspections can be incorporated into the machine for in-process inspection and analysis. The tool is also capable of conducting pass-through type inspections for visual and functional surface characterization. Additionally, the carousel module is designed to allow parallel loading and unloading videos during the process. The moving parts of SPARTAN are driven by a combination of leadscrew and precision ballscrews to achieve smooth motion and a high level of accuracy. An advanced cooling asset keeps the entire model operating within a narrowly targeted temperature range for optimal performance, reliability, and lifespan. ASYST / PST SPARTAN is a highly flexible and scalable equipment that is capable of handling up to 200 wafers at a time. Its multiple advanced features make it a great choice for high-volume, automated semiconductor, flat panel display, and other advanced technology production.