Used ASYST / PST SPARTAN #293798452 for sale

Manufacturer
ASYST / PST
Model
SPARTAN
ID: 293798452
Wafer Size: 12"
Vintage: 2007
EFEM Wafer sorter, 12" (3) Ports 2007 vintage.
ASYST / PST SPARTAN is a wafer handler developed by the company Pacific Technical Products that is used for the automated handling of semiconductor wafers. PST SPARTAN is a versatile tool that is well suited for use in rapid production and prototyping areas, as well as in laboratory applications. ASYST SPARTAN is designed to handle 200mm and 300mm wafers, as well as multiple cassettes, cassetteless applications and FOUP's. It features a top-loading robot to transfer wafers to and from the front opening unified pod (FOUP) storage boxes. It also has an auto-loading station where wafers can be loaded onto the robot directly from their cassettes. SPARTAN also has an integrated robot handling system and a modular design that can be adapted to suit a variety of applications. It includes five independent operating modes: single wafer, bulk transfer, store/retrieve, scanning/sort, and tool-to-tool transfer. In single wafer mode, wafers are handled one at a time and can be loaded, prealigned, and moved between processing tools or storage pods. In bulk transfer mode, the robot can transfer up to five wafers at a time from one place to another. This mode is ideal for quickly handling wafers for quick throughput or prototyping. Store/retrieve mode allows for wafers to be stored in a storage slot and retrieved on demand when needed. The scanning/sort mode allows for wafers to be scanned in multiple orientations, as well as be sorted based on certain criteria. The tool-to-tool transfer mode enables efficient movement of wafers between two or more different processing tools. ASYST / PST SPARTAN also offers a user-friendly graphical user interface (GUI) with Web-based remote access. It allows users to easily monitor the robot's progress and troubleshoot any problems that may occur. The GUI also provides up-to-date information about the wafer position accuracy and intelligent wafer processing statistics. Overall, PST SPARTAN offers a reliable and user-friendly solution for the automated handling of semiconductor wafers. With its modular design and multiple operating modes, it provides an efficient and versatile tool for rapid production, prototyping and laboratory applications.
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