Used ASYST / PST SPARTAN #9247586 for sale
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ID: 9247586
EFEM Wafer sorter
Includes:
Datum structure
Mini-environment
Wafer engine
End effector
Load port
Aligner
Front electrical enclosure
Bridge tool option
ASYST EG-300B Edge grip buffered wafer aligner
Accurate alignment:
Wafer centering: +/- 0.05mm
Notch angle: +/- 0.075 deg
Wafer buffer function: Minimize robot idle time
Integrated OCR cameras: Top and/or bottom read
Vacuum 80 kPa.43 L/mins
10mm Flex tube comptabile with SMC one touch fitting
Ethernet: RJ-45 Connection
Electrical requirements: 120 VAC, 15 Amp circuit, 10 Amps full load.
ASYST / PST SPARTAN is a high-performance wafer handler designed for the semiconductor industry. It is an automated wafer transport equipment designed to move, rotate, and transport semiconductor wafers accurately, with minimal damage and low total handling time. PST SPARTAN wafer handler is capable of carrying up to 12 wafers and moving them from one process station to another with pinpoint accuracy. The wafer transport system uses two stages and the ability to pick up and move wafers from either level simultaneously. The motion of wafers is based on the use of brushless linear servo technology, providing high precision, reliable, jerk- and jerk-less positioning. It also employs an encoder unit that ensures precise and repeatable motion in the X, Y, and R axis of wafer orientation. ASYST SPARTAN is designed to be virtually maintenance free and highly reliable over its lifespan. It is easy to install, with a robust scanning machine that detects wafers bubbles or edge chips and prevents the handler from picking up that wafer. The wafer handler has software for quick job setup and flexible programming to execute complex recipes quickly. SPARTAN wafer handler comes equipped with an anti-static, scratch-resistant shield to protect wafers from static electricity and scratches. Additionally, the housing is designed to ensure that dust particles and any other debris from the surrounding environment are kept from attracting to the wafer surface, prolonging its life. Its built-in fault-tolerant tool can identify, analyze, and resolve problems as they arise, ensuring the highest level of performance and error-free operation. It also includes user-friendly controls and color-coded touchscreen for easy access and operation. ASYST / PST SPARTAN wafer handler is designed to eliminate human labor and increase productivity in the semiconductor industry. It is a robust, reliable, and cost-effective solution for wafer transport and handling tasks. With its high precision, reduced maintenance requirements, and intuitive user interface, PST SPARTAN wafer handler is the perfect solution for many production and laboratory processes in the semiconductor industry.
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