Used ASYST / PST SPARTAN #9254166 for sale

ASYST / PST SPARTAN is a high-performance wafer handler for the automation of semiconductor manufacturing processes. It is an all-purpose wafer handling robot designed for use in semiconductor fabrication, test and assembly lines, and is used to handle wafers, dice, and other components. PST SPARTAN comprises of a series of components, including a main frame, a wafer pick/place turret, an Open Cassette Interface (OCI), an Open Tube Interface (OTI), a Stand-Alone Chamber Interface (SACI), an Arm Interface (AIA), an Arm Drive (AGD), a Sub-Assembly (SA), a Software Suite, and a Windows-based equipment. The main frame consists of a metal frame with an integrated pick/place turret and a 5-axis robot arm. The wafer pick/place turret consists of three chamber interfaces, an OCI, an OTI, and an SACI, to handle various wafer geometries and diameters. The 5-axis robot arm features a precision-controlled X-Y-Z positioning stage that can traverse 250mm/sec. Along with a unique z-friction drive and intuitive motion control, the robot arm is capable of performing high-precision pick/place moves with repeat accuracy of less than +/-25 microns. The Arm Interface (AIA) connects the robot arm to the main frame and provides the control signals required to move the robot arm. The Arm Drive (ADG) is a compact motor micrometer drive that is capable of providing accurate and repeatable motion control. The Sub-Assembly (SA) is used to interface and control the wafer pick and place turret. It is composed of a series of electronic boards and components that enable the production of wafer handling robots. ASYST SPARTAN also includes a Software Suite, which includes various software applications such as a pattern improver, an auto-calibrator, a step analyzer, and a real-time motion controller. The Windows-based system allows operators to quickly and easily configure and control wafer handling systems, as well as monitor and evaluate unit performance. SPARTAN offers a reliable and flexible solution for handling wafers and other components in semiconductor fabrication, test and assembly lines. With its intelligent control machine and precise motion capabilities, ASYST / PST SPARTAN is an ideal choice for any semiconductor industry.