Used ASYST / PST SPARTAN #9255878 for sale

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Manufacturer
ASYST / PST
Model
SPARTAN
ID: 9255878
Vintage: 2010
EFEM Wafer sorter With MATTSON Paradigme 2010 vintage.
ASYST / PST SPARTAN is a highly advanced wafer handling equipment designed to provide an automated and reliable solution for high-density, fast-changing wafer assembling and electronic testing. It comprises of a modular platform housing four separate components, namely: a multi-axis wafer loader, a segmented wafer stage, an automated wafer processor and a multi-axis wafer unloader. The multi-axis wafer loader is used to prepare the wafers for the assembly process. It features dual single-axis handling arms in a round trajectory, and a linear array of robot arms with direct connections to for precise and reliable loading of the wafers into the wafer locations. This allows the user to have precise control and harden the wafer loading steps, helping improve the process efficiency. The segmented wafer stage allows the wafers to be processed, in batches, to form a continuous process. It allows multiple wafers to be processed in parallel, ensuring a high throughput process. The wafers are automatically positioned under varying pressure through the use of pneumatic pressure cylinders embedded in the wafer stage. The wafers are then processed at variable rates, while remaining fixed on the same platform. The automated wafer processor is an integral part of the system, and allows users to configure their desired process parameters. This consists of an advanced, configurable robot arm capable of performing multiple tasks. The robot arm is controlled through an integrated control unit, and is capable of executing complex E-test and assembly operations on the wafers. Finally, the multi-axis wafer unloader helps re-allocate the processed wafers to other destinations. This component is capable of supporting various wafer handling operations, including die picking, sorting and re-lubrication. Additionally, the component is equipped with wafer pickups to facilitate re-loading of processed wafers into the loader module, and a vision machine to allow for higher processing accuracy. In conclusion, PST SPARTAN is an advanced and reliable wafer handling tool capable of performing complex assembly and E-test operations. It incorporates a modular platform housing four key components, a multi-axis wafer loader, a segmented wafer stage, an automated wafer processor and a multi-axis wafer unloader; each having been optimized for its specific task. Through advanced design solutions and integrated control systems, ASYST SPARTAN offers a reliable and automated solution for high-density and fast-changing assembly and testing needs.
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