Used ASYST / PST SPARTAN #9386363 for sale

Manufacturer
ASYST / PST
Model
SPARTAN
ID: 9386363
EFEM Wafer sorter.
ASYST / PST SPARTAN is a wafer handler designed to help with automated and manual wafer handling applications. This equipment is equipped with an array of robots and other components to facilitate the process. It can be used for processes such as wafer pick and place, wafer bonding, wafer transfer, and wafer singulation. The automated wafer handling system features three types of robots: the Scara robot, the X-Y cartesian robot, and the Delta robot. Each of these is equipped with advanced control technology and can handle hundreds of wafers up to 200 millimeters in diameter. The Scara robot is capable of carrying multiple wafers at a single time while the X-Y cartesian robot is capable of making fine adjustments to ensure accurate positioning of the wafer during processing. The Delta robot is a versatile robot and can handle a variety of processes. The unit also includes a vision machine with 3 CCD cameras and a lighting tool to detect objects. This allows the asset to recognize patterns and shapes on the substrate and to identify various wafers. It also serves as the backbone for the automated wafer handling model. The vision equipment is capable of assessing defect levels on wafers before hand-off to downstream processes. In addition to robots and vision systems, the system also comes with a variety of sensing functions and sensors. These include infrared and laser sensors, as well as pressure sensors. The sensing functions are used for providing feedback to operators concerning the position of the wafers with respect to the robots and other components in the unit. This is done to ensure accuracy and efficiency when handling wafers. Moreover, the automated wafer handling machine also features a wafer placement and processing unit. This unit contains an adjustable substrate clamp and a linear micro-actuator to accurately move and hold the wafer. There are also micro switches and other circuit-based components to detect signals and control the tool's operation. In effect, PST SPARTAN is a fully automated and reliable wafer handling asset. This model is flexible and can be customized to meet the specific needs of customers. It is designed to provide high precision and reliable results in wafer transfer and other processing operations. The equipment is equipped with comprehensive safety features and offers a complete solution for automated wafer handling.
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