Used ASYST R150 9701 4314-01 #143140 for sale
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ASYST R150 9701 4314-01 Wafer Handler is an automation component designed to transfer, feed, and handle wafers in semiconductor manufacturing machinery. It features a rotating table system, providing the movement needed to accurately place and remove semiconductor wafers from substrate and other molds. Its upright frame supports a pair of linear rails and four servo-driven linear actuators, one per corner. This arrangement provides a reliable and accurate double-row angle transfer to the wafer. The angle of the transferred wafer is adjustable within 90 degrees with a resolution of 0.5 degrees. The R150 is controlled via an intuitive hand-held Teaching Pendant. The Teaching Pendant has a User Interface featuring a variety of parameters and data access tools. Functions of the R150 Wafer Handler include wafer alignment, wafer rotation and flipping, and wafer adjustment. This system achieves accurate positioning with fine resolution by a combination of motion and feedback. The R150 also utilizes linear actuator feedback. All linear actuators provide position feedback data with 1 micron resolution. This advanced level of feedback allows for the precise alignment of various wafer sizes and shapes. The R150 can be operated in ambient environment with temperature ranging from 10°C to 40°C and relative humidity ranging from 20% to 80%. Its stainless steel frame is constructed with heavy-duty parts, making it suitable for durable operation in a wide range of dust and corrosive environments, such as semiconductor production lines. The overall design of the R150 Wafer Handler ensures a smooth operation and ensures that all wafers stay securely in place, preventing any potential damage due to movement or transfer. As a result, it is a reliable solution for high-volume semiconductor manufacturing processes.
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