Used ASYST SMIF 300 WMS #162781 for sale

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Manufacturer
ASYST
Model
SMIF 300 WMS
ID: 162781
Fully automated wafer transfer system.
ASYST SMIF 300 WMS (Wafer Management System) is a high precision, modular and cost-effective wafer handling system designed to handle wafers up to 300 mm in diameter. It is ideal for front-end and back-end wafer handling applications in a variety of industries, including semiconductor, data storage, MEMS, and photovoltaic. SMIF 300 WMS consists of one main chassis, a controller, and several modules mounted within the chassis. The main chassis contains a Siemens-compatible power supply, a power distribution board, a removable backplane, and several mounting plates for additional modules. The controller includes a touch-sensitive input device to facilitate user operation. The wafer handling capabilities of ASYST SMIF 300 WMS are provided through several modules. The Wafer Transfer Module (WTM) is used to accurately move wafer disks between their various stages of operation. The 3-Axis Autopositioning (3AX) module provides three-dimensional positioning capability while the Remote Sensor Tool (RST) module supports the use of bar code readers and laser scanners. The Vacuum Control Module (VCM) provides both pressure and vacuum control capabilities. SMIF 300 WMS is designed with high precision and repeatability to ensure reliable data and product quality. Its modular construction allows for custom configurations to meet specific customer requirements. In addition, its proprietary interface makes integration with existing systems simple and straightforward. The robust design of ASYST SMIF 300 WMS enables reliable operation in harsh environments. It complies with CE EMC, CE LVD, and IEC 61000-4-2 safety requirements and has passed UL, CE, and C-Tick certifications. The system is easy to maintain and troubleshoot due to its modular construction and LCD for independent diagnostic functions. SMIF 300 WMS is a state-of-the-art wafer handler providing superior flexibility and throughput to meet the demanding requirements of many industries. Its high-precision capabilities, modular construction, and proprietary interface make ASYST SMIF 300 WMS an excellent choice for applications requiring accurate and reliable wafer handling.
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