Used ASYST SMIF-300FL #121297 for sale

ASYST SMIF-300FL wafer handler is a fully-automated, compact, and highly reliable equipment used in semiconductor industry for production of integrated circuits. It is designed to facilitate the movement of wafers between special process chambers and the wafer load ports. ASYST SMIF 300FL is equipped with a 6-axis robotic arm which contains a single encapsulated arm, two linear actuators, 3 bottom plates and a 3-axis wedge tool chuck. The linear actuators provide precise movement and control within +/- .003mm of accuracy in X, Y & Z directions of motion. The robotic arm has an effective reach of 300mm and a maximum load capacity of 6 kgs. The 3 bottom plates provide a gentle and secure bottom surface to transfer and hold up to 6 wafers per operation cycle with ease. The 3-axis chuck is capable of smoothly removing, transporting and placing small and delicate wafers and other substrates, while the temperature can be maintained between 20 - 40 degrees Celsius. SMIF 300 FL also offers enhanced process flexibility with its remote recipe control, scalability, and multiple process chamber connections options. In addition to its robust control, ASYST SMIF 300 FL also includes an all-in-one integrated solution providing unmatched operation simplicity, and a full spectrum of safety features and protective measures. The system utilizes a Windows-based 5 level safety architecture for safe operation and reliable process control. This architecture ensures the detection of potential safety concerns and the prevention of any operation or unit failure that might lead to process contamination. Additionally, SMIF 300FL features an intuitive user interface, a powerful yet intuitive programmable logic controller, touch screen functionality and custom-made process integration packages for a wide array of processes such as Cleaning, PVD, CVD, Lithography and etc. The controller's open-architecture provides flexible deployment, software scalability, and robust production. SMIF-300FL is designed for easy access and maintenance, which makes it effortless to install any upgrades or to replace the parts. All these features advanced the wafer handling machine to new heights and make it an unbeatable choice for semiconductor industry. In conclusion, ASYST SMIF-300FL is a reliable and powerful option for wafer handling in the semiconductor industry. With its 6-axis robotic arm, 3 bottom plates, 3-axis chuck, robust safety architecture, intuitive user interface, and process integration packages, ASYST SMIF 300FL provides an efficient and cost-effective wafer transport and process solution.