Used ASYST SMIF-300FL #293653971 for sale
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ID: 293653971
Vintage: 2002
Loader
M/N: SMIF-300FL, S3, 25WFR
P/N: 9750-2000-00
2002 vintage.
ASYST SMIF-300FL Wafer Handler is an advanced wafer handling equipment designed to significantly improve the efficiency and precision of wafer handling in the semiconductor fabrication process. It is designed to handle wafers up to 200mm in diameter and features a wide array of features such as integrated motion control, high throughput, low gap and interference design, and a bright lighting system. The unit is designed for maximum throughput and includes a highly efficient flexure arm which allows for precise alignment and movement of up to three wafers at a time. ASYST SMIF 300FL Wafer Handler is outfitted with a flexure arm that is capable of multi-axis control, allowing for a high degree of alignment accuracy and flexibility in wafer handling tasks. The arm is loaded with a wafer lifter and a vacuum suction plate, allowing the handler to pick up and transport up to three wafers at a time. The machine also includes a bright LED lighting tool to facilitate accurate alignment and minimize errors in handling delicate wafers. The motion control asset in SMIF 300 FL has multiple features designed to provide maximum throughput and accuracy. A number of programmable speeds are available for the handler, allowing for optimal flexibility when handling wafers. The arm can be set to rotate within a defined range, move linear within a defined range, or move along an automated path, allowing for maximum flexibility and throughput in semi-conductor processing. The model also features a low gap and interference design, allowing for minimal interference and contamination between wafers. The wafer transport mechanisms can stop within 65µm of the transfer target, allowing for precision wafer handling. Additionally, the handler has a built-in active damping equipment, which helps reduce the interaction between wafers and the handler's arm, minimizing the risk of mechanical vibration and damage to delicate wafers. SMIF-300FL Wafer Handler is an advanced and versatile system, providing semiconductor fabrication processes with a high degree of accuracy, throughput, and flexibility. It is capable of handling wafers up to 200mm in diameter, is equipped with a high-precision flexure arm, and is outfitted with a bright LED lighting unit. It also features a low gap and interference design to reduce contamination, a built-in active damping machine to reduce wafer vibration, and a motion control tool with programmable speeds for maximum throughput.
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