Used ASYST SMIF-300FL #293682366 for sale

Manufacturer
ASYST
Model
SMIF-300FL
ID: 293682366
Vintage: 2002
Loader M/N: SMIF-300FL, S3, 25WFR P/N: 9750-2000-00 2002 vintage.
ASYST SMIF-300FL wafer handler is an automatic handling equipment specifically designed for semiconductor lithography applications. It is a complete, fully-automated wafer handling solution that can process up to 32 wafers at a time. It is designed to meet the needs of semiconductor manufacturers for high throughput, accuracy, and reliability. The system uses vacuum-based pick and place modules to process the wafers. When the appropriate endpoint is reached, the wafers are stopped and placed in the SMIF cassette for further processing. It also integrates a robust unit for mapping and tracking wafers on the cassette and wafer level. This machine enables efficient tracking of each wafer's location during its processing. ASYST SMIF 300FL consists of four main components: a controller, a SMIF handler, a robot, and a manual handler. The controller enables the user to control the operation of the tool. The SMIF handler is responsible for moving wafers from the source cassette to the internal SMIF cassettes. The robot is responsible for moving wafers to the proper endpoints and working with the manual handler for manual loading and unloading operations. The manual handler is responsible for providing the user with manual control over transfer, loading, and unloading operations. The asset integrates flexible wafer handling options such as single or double wafer handling, cassette to cassette transfers, and wafer to wafer transfers. It also supports standard protocols including SECS/GEM and WATC. SMIF 300 FL can process up to 32 wafers at a time, making it a highly efficient and productive tool for semiconductor lithography applications. The model is also equipped with an internal temperature and humidity monitoring equipment, as well as an advanced safety system that prevents environmental contamination. The unit also includes features such as an automatic wafer history log and a vacuum cleaner for easy maintenance. ASYST SMIF 300 FL wafer handler is a powerful and reliable machine for semiconductor lithography applications. It offers efficient wafer handling, accurate mapping and tracking capabilities, as well as enhanced safety features. It is also easy to maintain and is designed for high productivity and reliability.
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