Used ASYST SMIF-300FL #9008182 for sale

ASYST SMIF-300FL is a high-performance wafer handling equipment designed for use in the automated loading and unloading of multiple wafers for processing in semiconductor and other related industries. The automated handling system is available in both manual and automatic versions, providing dual zone loading capability. The manual unit employs a single stage robot to load, transport and unload up to 300mm (12 inch) wafers. The automatic machine employs three robotic mechanisms, providing a variety of transfer capabilities, allowing for the movement of multiple wafers within the same zone. The tool offers high throughput and precision, with a maximum robot speed of 180mm/sec and a repeatability of 1 μm. The robust design is capable of handling a variety of wafer sizes and thicknesses up to 300mm (12 inch) with a weight capacity of up to 180g. It also features a low contamination design, providing consistent cleanliness and ensuring product protection. This low contamination operation provides the ability to minimize particle generation during the manufacture of sensitive devices. The asset is designed for easy maintenance and flexibility. The multiple axis design allows for quick and easy robot movement and the rotational capability allows for rotation of wafers. The standard configuration allows for easy access to all internal components, enabling the replacement of parts to reduce maintenance and repair times. The capacity to adjust drive parameters allows for automation of the model to meet the user's specific requirements. ASYST SMIF 300FL is compatible with most industry standard materials, including flat panel display (FPD) glass substrates and rigid wafers. It is also compliant with various mechanical standards, including JEDEC and IEC standards for wafer handling. The equipment is designed to be integrated into most production facilities and is capable of gaseous processes, including: vapor phase reflow, sputter, polishing and ion implantation. This high-performance wafer handling system is capable of delivering high throughput and precision for the handling of multiple wafers. With a robust design and low contamination operation, SMIF 300 FL is ideal for automated production processes in the semiconductor and electronics industries.