Used ASYST SMIF-300FL #9023346 for sale
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ID: 9023346
Vintage: 2002
Wafer load port
Model no. SMIF-300FL, S3, 25 WFR
Part no. 9750-2000-00 rev 013
2002 vintage.
ASYST SMIF-300FL wafer handler is an automated wafer handling system designed to manage the high-volume loading and unloading of wafers during semiconductor manufacturing processes. ASYST SMIF 300FL features a quick-change pick-up module for fast wafer exchange, integrated wafer scrub capability, and advanced in-situ scanning for wafer orientation determination. SMIF 300 FL is capable of both handling and slabbing configured wafers in 300mm, 200mm, or 150mm configurations. It is designed to efficiently move wafers up to 1mm thick and 40mm in diameter at up to 300mm per second. Additionally, ASYST SMIF 300 FL features automatic wafer orientation determination and detection of damaged wafers. SMIF-300FL features a highly modular design allowing for flexible configuration. It can be paired with existing equipment such as furnaces, scanners, or metrology tools. Additionally, the system's modular approach allows for easy upgrades such as the integration of additional wafer cassettes, FOUP, and robots. SMIF 300FL wafer handler is suitable for use in a range of wafer manufacturing processes. For example, it can accommodate unprocessed wafer scrubbing, imaging, and cleaning, as well as Sorting, epi-etching, and pre-metal deposition processes. ASYST SMIF-300FL is also designed with safety in mind and features a variety of built-in safety protection features. ASYST SMIF 300FL is an advanced and reliable wafer handling system that takes the difficulty and safety risks out of handling and transferring complex wafer configurations. It is the ideal choice for high-throughput production environments and offers unprecedented levels of safety and efficiency.
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