Used ASYST VersaPort 2200 #293748864 for sale
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ASYST VersaPort 2200 is a fully automated wafer handling equipment designed for back-end semiconductor processes. It is designed to handle up to 200 wafers per hour across a wide range of wafer sizes, from 2 to 6 inches (50mm-150mm) in diameter. It features an intuitive touchscreen interface that guides users through setup, automated wafer identification, transfer, and robotics movements. VersaPort 2200 is equipped with two integrated robotic devices: a Vacuum Robot (VR) and a Moving Board Robot (MBR). The Vacuum Robot ensures high repeatability and accuracy when transferring wafers. The VR incorporates large IO ports for connection to multiple wafer sources, allowing for fast transfer times with minimal downtime. The Moving Board Robot (MBR) utilizes a triple vacuum environment to ensure proper wafer placement and enable high-speed wafer transfers. ASYST VersaPort 2200's robust wafer handling techniques ensure safety and reliability. Wafer sensing and jam detection are provided via integrated light curtains. Additionally, its precise load planer programming allows the system to identify and process multiple wafer types and sizes. Software Control options such as its Wafer Control Center and SmartRecipe Tool provides precise control over its whole operation. This advanced wafer handling unit also features an array of optional accessories for additional user convenience. These accessories include a Wafer Carrier Tray Machine for storage and handling of multiple wafers, and a Wafer Chuck for holding wafer carriers on the conveyor tool. VersaPort 2200 also features an ever-expanding library of compatible components and tools, allowing for integration of multiple processes with minimal downtime. ASYST VersaPort 2200 is a reliable and precise wafer handling asset designed to meet the rigorous demands of back-end processes. Its advanced automation and control capabilities ensure smooth operation and reliable wafer transfers. With its intuitive user interface, adjustable accessory options and ever-expanding library of compatible components, VersaPort 2200 is well-suited for the most demanding semiconductor production environments.
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