Used ASYST VersaPort #293587537 for sale

ASYST VersaPort
Manufacturer
ASYST
Model
VersaPort
ID: 293587537
SMIF Load port.
ASYST VersaPort is a state of the art wafer handler designed to reduce costs, increase throughput and enable high levels of automation for semiconductor and optoelectronics production. VersaPort is capable of handling wafers up to 12" in diameter, providing flexibility for a wide range of wafer sizes and processes. It both transports and processes wafers from input to output in a fully automated fashion. ASYST VersaPort is comprised of several key components, namely the ASIC (Application Specific Integrated Circuit), the arm module, the adapter module and the peripheral interface. The ASIC is the product of ASYST Technologies' design toolkit and operates as the central control logic for VersaPort equipment. It supports the whole system and accommodates the user's specific needs. The arm module is an essential component of ASYST VersaPort. It provides the robotic arm with a knuckle-jointed end effector, allowing it to move, rotate and manipulate the wafer. The adapter module provides a platform to securely mount the wafer while in use and allows easy exchange of wafers between its connectors. In addition, it can be used to integrate with external machine tools, such as ion implanters, CVD sputtering systems, curing ovens and mapping tools. The Peripheral Interface is the last major component of VersaPort. It serves as the connection between ASYST VersaPort and peripheral devices such as vision systems, mapping tools and printers. Working together with the arm motor, this interface allows for easy integration of these devices and the remote monitoring of wafer production. The current iteration of VersaPort offers several additional features, such as End Effector Interchangeability (EEI), which allows for quick and easy swapping of end effectors to accommodate different wafer sizes, layouts, geometries and processes. EEI also reduces down time due to convenient maintenance and serviceability. The unit is also highly modular and configurable, allowing for flexibility and expansion of the machine with the user's needs. In addition to the core ASYST VersaPort components, ASYST offers additional accessory products to further customize VersaPort for specific production needs. ASYST TechnologiesASYST VersaPort wafer handler is the ultimate solution for high throughput and cost-efficient wafer production. Its advanced engineering, dedicated accessories and configurability makes it an excellent choice for companies seeking an automated and accurate way to handle high volumes of wafers and substrates.
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