Used ASYST VersaPort #293600170 for sale

ASYST VersaPort is a wafer handler designed to provide an integrated, single-location robot equipment to address the needs of many wafer handling applications in the semiconductor industry. VersaPort is capable of both pick and place functions, and has a high level of flexibility and scalability to meet the changing process and production requirements. ASYST VersaPort system is comprised of several main components, including a robot, a controller, and several modules for peripheral connectivity. VersaPort robot, also known as an articulated robot arm, is a versatile, high-speed robotic unit that can function both autonomously and adaptively. Its controller is an integrated, modular motion controller integrating multi-axis motion control, path control, recipe management and robotic command execution into a single hierarchical control machine. Its peripheral connectivity modules enable ASYST VersaPort tool to interface with a wide range of wafer equipment and components, such as spin tube, flip tube, and pick and place chucks. VersaPort uses advanced, robotic vision systems to inspect, identify, and accurately and rapidly place wafers into and out of the cassette slots. ASYST VersaPort also features load-lock capabilities and vacuum management features to ensure wafers do not escape or become damaged during the transfer process. Furthermore, VersaPort comes with integrated sensors and safety systems to reduce risk of asset failure. The sensors detect and monitor conditions in the robot area, such as model stresses and load, allowing the robot to shut down or reroute in the event of an emergency. The safety systems include an integrated Door Interlock equipment and an emergency Stop button. ASYST VersaPort is equipped with powerful software and programming facilities to support automated wafer handling applications. It has comprehensive motion programming capability, multi-level control, parameters and definitions, advanced recipe control, and interchangeable program sequences. In addition, VersaPort can be easily reconfigured for different processes and applications. ASYST VersaPort is a versatile, high-speed robotic system for various wafer handling applications, providing impressive levels of flexibility and scalability. It combines automated motion, vision inspection, and safety systems into a single-location solution. VersaPort is a reliable and efficient wafer handler, enabling fast and accurate operation with high yield.