Used ASYST VersaPort #9213041 for sale

ASYST VersaPort
Manufacturer
ASYST
Model
VersaPort
ID: 9213041
SMIF Load port.
ASYST VersaPort is a wafer handler designed to enable quick and efficient production for various applications. VersaPort is a single-piece multi-station wafer transfer equipment that delivers precision and reliability with inverted and horizontal orientation. It can be configured to support multiple applications with automated or manual loading of wafers. ASYST VersaPort utilizes a modular system that allows for the expansion of a single wafer handler with user-definable flexibility. The unit is designed to be as compact as possible and is controlled by a centralized control hardware machine. The in-situ electrostatic clamp tool provides constant contact between the motions axes and the wafer for precise placement during transfer. VersaPort's advanced design and intuitive user interface provide a rich set of controls and features to ensure efficient production. ASYST VersaPort's support accessories can be integrated into the robotic body to provide additional functionality. This includes automated load lock add-ons, pre-aligners, and buffer stackers. These accessories are designed to reduce the amount of manual handling when operating VersaPort. The asset also includes load/unload arms, wafer chucks, and adapter platters which allow for a variety of configurations depending on the application. ASYST VersaPort is capable of performing high speed sorting, high accuracy equipment control, wafer transfer, and indexing. Its sophisticated vision model allows for wafer recognition, alignment, and barcode read performance of 5+ wafers per second. Load stability is ensured with its rigid frame design and non-contact sensor technology that maintains wafer stability during transfer. The equipment also includes environmental control features, such as nitrogen purge, vacuum transfer, and optional electron beam control interfaces. VersaPort wafer handling systems allow users to experience the efficiency of a single platform for a variety of wafer applications. Its powerful, compact, and reliable design provides a cost effective solution to wafer handling needs. It is expandable and customizable to meet the specific needs of each application. With its wide range of features and accessories, as well as its powerful control features, ASYST VersaPort increases manufacturing efficiency and throughput.
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