Used ASYST VersaPort #9219619 for sale

ASYST VersaPort is a wafer handler designed to provide automated, in-line loading and unloading of semiconductor wafers. It is a fully automated handler that has a high throughput capacity and is designed to reduce set-up times and minimize human interaction. VersaPort is designed to offer maximum flexibility with a wide range of process options and tool capabilities. ASYST VersaPort can handle wafers up to 200 mm in diameter, with a capacity of up to 15 wafers per cycle. It is designed to be an effective and efficient wafer handling solution with an intuitive user interface. VersaPort is equipped with optional vision systems that allow for process control, wafer sorting, and inspection capabilities. These vision systems can also detect wafer scratches and other defects, enabling precise wafer handling during the process. ASYST VersaPort is able to interface with a variety of process tools and can be integrated into existing processing lines. It has the ability to transfer wafers from one tool to another without manual intervention and can be configured for both in-line and off-line operation. VersaPort has multiple process options that feature high throughput and uniformity. These process options are designed to maximize throughput and produce the highest yields with minimal defects. ASYST VersaPort also features an advanced robotic equipment that is capable of charging, transferring, and de-charging wafers. This system utilizes a two-stage decomplestration unit for precise wafer handling during loading and unloading of process tools. The robotic machine is powered by an energy efficient design to reduce energy consumption. An offline programmable software interface is incorporated to allow for fast process changes and recipe development. VersaPort is equipped with various safety mechanisms and features that ensure operator and wafer safety. It is designed to reduce human errors with precision alignment and automated wafer handling. An integrated vision tool is included to detect any misalignments and provide feedback for process correction. ASYST VersaPort is designed to reduce downtime and increase productivity with its intuitive user interface and advanced automation capabilities.