Used ASYST WMS 2200 #293636083 for sale

ASYST WMS 2200 is a wafer handler that is embedded with advanced wafer transport systems, providing automated wafer/reticle/die sorting, loading and unloading capabilities. WMS 2200 offers superior performance with its integrated material tracking, alarm management and industry-leading software. The wafer handler is expandable and fully configurable, with a footprint of 1300mm x 1430mm, a width of 865mm, a height of 1658mm and a maximum weight of 1300kg. ASYST WMS 2200 is capable of handling a variety of substrates, including up to eight 200mm wafers, as well as multiple reticles, dies and panels. It features two auto-loading and unloading systems, each equipped with two independent loading stations. WMS 2200 also features two standard FOUP (Front Opening Unified Pod) ports, two vertical FOUP ports, two low height FOUP ports, and two vertical cassettes ports. All of these ports support the full range of FOUP sizes, including pod types of various heights, as well as door types of different geometries. Equipped with an advanced wafer transport system, ASYST WMS 2200 also includes a series of internal sensors and state-of-the-art motion control. These controls ensure accurate and reliable operation with minimum motion jitter, even at the highest operational speeds ranging up to 32,000 mm/min. The sensors help detect substrate deformation and alignment, ensure proper handling motion, and verify die identification information. WMS 2200 also includes an extensive range of safety features, including a bot door interlock control system, FOUP door safeties and clamps, misalignment trip zone and soft stop detection, fast stop detection, and interlocks and covers for moving parts. In addition, the handler is equipped with several user-friendly features, such as a multi-level cassette access system, a touchscreen graphical user interface and a range of adjustable parameters for customizing operation. ASYST WMS 2200 also includes a wide range of automatic real-time diagnostics, parameter sets and barcode reader systems, as well as a range of material tracking databases and utilities, that provide greater reliability and flexibility in operation. In conclusion, WMS 2200 offers a complete wafer handling solution that is suitable for many applications, combining powerful automation, advanced safety features and user-friendly features, enabling high-speed, high-precision operations. The wide range of material handling, tracking and process control capabilities, make this handler a top choice for semiconductor and opto-electronic manufacturers.