Used BLUE M S05IEU55 #9236617 for sale

BLUE M S05IEU55 wafer handler is a robotic wafer handling equipment designed for transferring and handling wafers for a variety of processes. This system is capable of transferring wafers between workstations, process development centers, and even multiple tools, allowing maximum flexibility and efficiency in automated wafer handling. The unit is made up of a base unit, two upper lift arms, and five lower guide probes. The base unit measures 1750mm by 1150mm and has an elevated work area. The lift arms are hydraulically actuated and can lift up to 500mm above the base unit. The lower guide probes are also hydraulically actuated and can raise up to 45° above the base unit. The machine is equipped with a 6-axis robot arm that is capable of controlling up to four robots. Each robot has its own parameters, allowing it to move separately or as a group. The robot arm can move up to 900mm horizontally and up to 600mm vertically. The robot has a maximum speed of 2.5m/sec and a reach range of 1.5m above the base. The wafer handler also features an automated wafer exchange station that can support up to two different frames and eight different wafer sizes. The exchange station is equipped with an integrated vision tool and a high quality image processing software. This software enables precise positioning of wafers of different sizes using tolerance and machine vision settings. The asset also has a wafer lift that can securely hold wafers for transfer. The wafer lift has a capacity of up to 3500g and is capable of automatically rotating up to 270° without damaging the wafer. The model is also compatible with other equipment, such as vacuum valves, force sensors, cluster tools, and inspection systems. S05IEU55 wafer handler is built with a modular design and is rated for use in ESD and cleanroom environments. The equipment is designed to be reliable with low operating and maintenance costs and is supported by a wide range of accessories and services. With its excellent performance, BLUE M S05IEU55 wafer handler is an ideal choice for efficient automation of wafer handling tasks.