Used BROOKS AquaTran #158153 for sale

Manufacturer
BROOKS
Model
AquaTran
ID: 158153
Robots and controller for NOVELLUS.
BROOKS AquaTran is a state-of-the-art wafer handler. It is designed to handle wafers of any size up to 200mm x 200mm. AquaTran features a low-force, low-angle transfer mechanism, as well as a compact, ergonomic design. The equipment has a fully enclosed operating environment designed to protect the wafers from dust, water, and other contaminants. The enclosure also serves to provide thermal management and minimize noise levels. The environment is sealed and pressurized, allowing the system to operate in a vacuum as low as 1 Torr, as well as other non-vacuum operating environments. BROOKS AquaTran is equipped with a vacuum loadlock unit to minimize wafer handling time and protect the wafers from environmental contamination. It is also equipped with an electrostatic charge monitor that can detect any leakage of electrostatic charges emitted by the wafers. The machine is designed to provide rapid, high-efficiency wafer processing. It features a high-accuracy positioning tool and a three-axis servo drive asset, as well as an automated positioning model that ensures precise wafer alignment and placement. Additionally, it is equipped with a sophisticated gas flow equipment for clean, low-pressure process and wafer loading. AquaTran is optimized for both temperature-controlled processes and lithography systems. Additionally, it can be programmed to directly control the entire lithography system, significantly reducing manual process time. The unit is compatible with the most advanced wafer-handling and transfer technologies, allowing it to integrate with virtually any production unit. Additionally, it is capable of communicating with other systems, such as host computers. This ensures seamless integration between BROOKS AquaTran and other systems. Finally, the machine is extremely reliable, with a mean time before failure rate of greater than 4000 hours. This ensures maximum throughput, yield, and quality control.
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