Used BROOKS AUTOMATION 002-1099-02 REV A #9292367 for sale

BROOKS AUTOMATION 002-1099-02 REV A is a high-performance wafer handler designed to provide automated, accurate, and fast wafer movement and control. It offers a combination of precision, fine motion control and automated wafer handling. It is designed to meet the critical wafer handling requirements of the semiconductor industry. 002-1099-02 REV A wafer handler features low-profile construction with a single vertical column and upper and lower components for improved stability and maneuverability. The vertical column controls the motions of the wafer to ensure accurate and precise positioning. It utilizes a robotic arm equipped with torque motors to enable manual and automated grip, move, and retract functions. The robotic arm has an internal Brushless DC (BLDC) motor for high speeds and acceleration performance. The wafer handler also features a unique three-axis operation to allow up to three wafers to be manipulated simultaneously. Each axis features a belt driven rotary actuator with an integrated encoder and motor. The encoder provides a resolution of 0.05mm for precise positioning of the wafer during handling operations. The belt drive provides smooth and quiet operation. BROOKS AUTOMATION 002-1099-02 REV A also features a programmable wafer positioning interface for precise and controlled wafer placement. The interface includes two precision optical encoders to monitor wafer position and a programmable logic controller (PLC) to control the position of the wafer. An air bearing vacuum chuck is included with the equipment to securely hold wafers during transport and handling operations. 002-1099-02 REV A also features a user interface for simplified system operation and control. The user interface includes a multi-function display and a graphical touch-screen interface for programming and operating the unit. The user interface allows for efficient and accurate operation of the wafer handler machine. BROOKS AUTOMATION 002-1099-02 REV A is an advanced wafer handler tool that combines superior precision and speed with automated wafer handling capability. It is a reliable and robust tool for the semiconductor industry that is capable of providing accurate and fast wafer positioning and manipulation for a wide range of applications.