Used BROOKS AUTOMATION 002-7090-05 ATR-7 #293643073 for sale

BROOKS AUTOMATION 002-7090-05 ATR-7 is a wafer handler designed specifically for semiconductor applications. This wafer handler is capable of handling a variety of wafer types and sizes, with the capability to safely transport, align and locate wafers without damaging them. The ATR-7 achieves this by featuring a precision driven alignment equipment, which utilizes a motorized stage, supported by a microprocessor-controlled servo system. The motorized stage is capable of highly precise X and Y coordinate positioning and is able to provide a spatial repeatability of 0.3 μm at distances of 300 mm. This precise alignment unit allows for the precise alignment and transport of wafers with a dimensional variation of up to 2.5 mm. The wafer handler is designed with a variety of safety features that help ensure the whereabouts of each wafer and reduce any potential contamination risk. This includes a number of sensors used to detect mishandling of the wafer as well as an integrated monitoring machine to ensure proper alignment when transferring the wafer. Other features include a heated trucking module, electronically adjustable process speed, and data logging capabilities. In order to transport and align wafers securely, the ATR-7 wafer handler is designed with a variety of options in both wafer carrier and wafer-to-carrier accuracy. The included wafer carrier allows for a precise and repeatable alignment, ensuring each wafer is properly centered during transport and it can hold up to twenty 200 mm, 7 inch or three 8 inch wafers. The carrier also includes a sensing mechanism for detecting individual wafers and the presence of an STS, ETS, or DTS test tape. Additionally, the wafer-to-carrier accuracy of the ATR-7 is adjustable from 0.15 µm up to 3.5 µm, allowing for precise placement of each wafer within the carrier. 002-7090-05 ATR-7 is a highly reliable and precise wafer handler that is designed to facilitate safe, accurate, and efficient wafer transfer and automated wafer processing in semiconductor applications. It provides high accuracy, repeatable alignment, and the ability to handle a variety of wafer sizes and types, all in a safe and secure manner. It is an ideal solution for automated wafer processing applications that require precise alignment, tracking, and transport of wafers.