Used BROOKS AUTOMATION 002-7090-05 ATR-7 #9386160 for sale

BROOKS AUTOMATION ATR-7 is a multi-purpose wafer handler that is capable of performing different automated tasks for fab operations in semiconductor production. It is ideal for use in process chambers, clearing stations, and clean rooms as it provides a cost-effective solution to efficiently move, transport and process wafers. The ATR-7 utilizes a novel vision system, allowing it to precisely identify and manipulate objects in its environment. Using the vision system, the ATR-7 can not only identify wafers but also locate specific points on a wafer for manipulation and processing. It provides dense wafer storage and can be used to both store and transport partials, or fractional pieces of wafers while loading and unloading from a cassette. The ATR-7 also enables maximum throughput and provides flexibility in wafer processing, allowing for compatibility with application specific needs. Beyond wafer handling, the ATR-7 also includes additional features that enhance its performance and increase its overall capabilities. It can be integrated with software and hardware options such as a generic tool controller interface and an advanced digital I/O which allows for interactive communication with a host. The ATR-7 includes multiple safety features such as interlocks, automatic door closure, output shutoff, and power failure protection. These safety features help ensure that tool operation is conducted safely and with minimal risk of harm. In addition, the ATR-7 includes intuitive user interface, allowing for easy set-up and use. It is compatible with pneumatic and motorized wafer pod carriers and can handle sizes from 200mm to 300mm. The ATR-7 is an innovative and versatile machine, making it an ideal choice for wafer processing operations. With its precise vision system, multiple optional features, and safety features, BROOKS AUTOMATION ATR-7 is a comprehensive and reliable solution for any wafer handling needs.