Used BROOKS AUTOMATION 002-7200-21 #9169693 for sale

BROOKS AUTOMATION 002-7200-21 is a fully automated, robotic wafer handler designed for loading/unloading 300 mm diameter wafers in semiconductor manufacturing applications. The handler contains an array of components and features that work together to provide an efficient, reliable, and safe environment to automatically transport wafers into and out of the processing tool. The handler boasts a unique mechanism for gripping the wafers securely while still maintaining a gentle, protective touch with no contact to the surface of the wafers. The gripping mechanism utilizes a brushless DC motor and a rotary output cam to drive two independent vacuum chambers for the wafer. The motor also creates a low-level vibration that helps the vacuum keep the wafers secure. Additionally, the vacuum has a soft start and a variable acceleration and deceleration profile so that wafers are handled safely. The handler also features a temperature-controlled wafer cassettes to store wafers prior to and after processing. The temperature of the cassette is monitored and maintained using an advanced thermal control system that ensures optimum performance and wafer handling accuracy. Moreover, the cassette can be interchanged quickly and easily so that wafers can be processed in succession without significant delays. The entire system is monitored by sophisticated control software. The automation software enables operators to adjust parameters such as servo settings, thermal control system parameters, and wafer transport speed while on the fly. Additionally, the software allows for remote monitoring and diagnostics of the handler to ensure the highest levels of performance and reliability. The software also includes features such asalarm resolution logging and self-diagnostics so that any problems or faults can be quickly identified and addressed. Overall, 002-7200-21 is an advanced wafer handling solution that provides tremendous levels of accuracy and convenience for semiconductor processing operations. The handler incorporates a variety of mechanisms and technologies to ensure the safe and secure transport of wafers with minimal maintenance requirements. Ultimately, the handler is an essential tool for streamlining wafer fabrication processes and ensuring utmost levels of quality and reliability.