Used BROOKS AUTOMATİON 002-7391-47 #293643080 for sale

BROOKS AUTOMATİON 002-7391-47
ID: 293643080
Robot wafer pre-aligner.
BROOKS AUTOMATİON 002-7391-47 is a dependable, industrial-grade wafer handler ideal for semiconductor manufacturers. This wafer handler features a modular design, allowing manufacturers to customize the equipment to meet their exact needs and connect different kinds of robot arms, boats and viewports. The system accepts all kinds of semiconductor wafers, such as the 200mm, 300mm, or 500mm, safely and securely. Additionally, it features a high-level particle control and cleanliness to meet the highest specifications required. The core of 002-7391-47 is its robotic arm assembly. This flexible and spindly arm offers precision movements to wafer alignment and transfer. It is made of Aluminum alloy and can move up to 200 mm in lifting height, allowing for reliable and accurate transfer of wafers between the source and destination pod. The other core part of the unit is its boat assembly, which helps transport and store the wafers at various stages of the manufacturing process. The boat, made of stainless steel, can hold up to 200 wafers of different diameters and thicknesses. It has a low defect rate with features such as an anti-skip machine, which allows for minimal wafer damage as they are transferred. The boat also has a built-in safety mechanism, designed to prevent overheating, complete with an optional inert atmosphere generation module. BROOKS AUTOMATİON 002-7391-47 also features a viewport assembly, designed to offer the operator a clear view throughout the entire process. The viewport's glass is unobstructed, allowing the operator to monitor wafer processing without obstruction. On top of this, the viewport is sealed against dust and moisture with a gasket. Finally, 002-7391-47 is also constructed from high-grade aluminum and stainless steel, ensuring reliable performance and easy maintenance. All parts are precision-engineered, allowing for smooth operation, high repeatability, and accuracy over multiple processes. The modular design also makes for easy installation, with minimal downtime. In summary, BROOKS AUTOMATİON 002-7391-47 is a reliable, state-of-the-art wafer handler ideal for semiconductor manufacturers. It is designed for flexibility and speed, featuring an all-in-one robotic arm, boat and viewport modules, with added features such as low defect rate, anti-skip tool, and a built-in safety mechanism. It has a high-grade construction and modular design, allowing for quick and easy installation, maintenance, and reliable performance.
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