Used BROOKS AUTOMATİON 002-7394-01 REV B8 #9292388 for sale

BROOKS AUTOMATİON 002-7394-01 REV B8
ID: 9292388
I / O Assy board.
BROOKS AUTOMATİON 002-7394-01 REV B8 wafer handler is a precision robotics equipment used for handling large size wafers in a clean environment. It is designed to provide safe, gentle, and accurate handling of wafers with a maximum diameter of 200 mm. The handler is highly reliable and features a robust and sturdy mechanical design as well cassette load/unload capabilities. The base unit of the robot consists of two large iron frames and a large base for securely mounting the wafer handler. The frame design includes dynamic vibration isolation for up to 5G, making it ideal for use in high vibration environments. Additionally, the base includes air filtration paths for optimum particle control. The robot is powered by an 80V DC motor drive system paired with a high-resolution rotary encoder for positional accuracy. This unit includes a flexible communications port for connection to a host machine. The handling element of the robot is composed of two arms, both of which are capable of 180 degrees of rotation to cover a wider range of wafers. The arm movements are powered by a combination of air cylinders, linear shafts, and Lead screws. To ensure smooth and safe handling of the wafers, both arms are equipped with LED-based wide angle lighting and gripping pads with rubber coating. Additionally, the robot includes soft stops and over-travel protection to guarantee wafer safety. The robot also includes two independent end effectors, one for wafer gripping and the other for rotary table control. The wafer gripping end effector includes contactless sensing systems and micro actuators for gripping the wafer along its edges. This grip can be adjusted to accommodate different sizes of wafers while elastic pads offer a form-fitting compliance to prevent damages. On the other hand, the rotary table end effector is designed with a smooth surface for secure and repeatable grasping. 002-7394-01 REV B8 wafer handler is capable of handling multiple stages through its programmable movement controller. It also includes several predefined recipes for common tasks such as sorting, transferring, flipping, and flipping over. The user-friendly interface and intuitive instruction guide simplifies the programming for maximum efficiency. The robot also features safety interlock systems for protection against any kind of physical damage to the operator. Finally, BROOKS AUTOMATİON 002-7394-01 REV B8 wafer handler comes with one year warranty from the manufacturer for customer satisfaction.
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