Used BROOKS AUTOMATION 002-7800-07 #293635378 for sale

BROOKS AUTOMATION 002-7800-07 wafer handler is an advanced wafer manipulation equipment designed for high precision wafer transfer, handling, and alignment. It is a highly sophisticated system made of rotary and linear motion components that work in concert to accurately pick up and place silicon wafers in the precise location for further processing or storage. 002-7800-07 utilizes a precision-machined five-axis robotic end-effector which is designed for optimum accuracy and repeatability. This end-effector employs two linear transfer stages, one for wafer indexing, and a powerful three-axis rotary arm for flatness and orientation control. The linear transfer stages create a planar motion in both X and Y directions, while the rotary arm provides motion in three axes: roll, pitch, and yaw. All of these motions are managed by a servo motor control and drive unit which is responsible for generating the accurately controlled motion needed to ensure delicate wafer handling and placement with extreme accuracy. BROOKS AUTOMATION 002-7800-07 also incorporates a user-selectable wafer clamping mechanism that can be used to secure single or multiple wafers during transfer. This robust clamping mechanism is electronically adjustable, and can be configured to accommodate a wide range of wafer sizes. A wafer pre-alignment stage is also incorporated, allowing for precise wafer location prior to the robot's handling. 002-7800-07 provides a number of external interfaces for communication and machine control. This includes a serial port, USB, Ethernet and optional IEEE 488.2 interfacing. Additionally, BROOKS AUTOMATION 002-7800-07 can be operated remotely or programmed with a basic teach-repeated method. The tool can monitor the position of the robotic end effector for maximum accuracy through a rotary encoder CCD measurement asset and an optional vision model. Overall, 002-7800-07 is an advanced wafer handling equipment that provides extreme accuracy and repeatability when manipulating and transferring wafers. Thanks to its powerful, precision motion controls and external interfacing capabilities, it can provide an invaluable step in advancing the process of wafer fabrication.