Used BROOKS AUTOMATION 002-9400-04 #9064599 for sale

BROOKS AUTOMATION 002-9400-04 wafer handler is a fully automated wafer handling tool designed for precise and efficient transfer of multiple high-volume wafers. This automated equipment is capable of simultaneously transferring up to four 6-inch wafers in a single operation, enabling increased throughput and increased volume. 002-9400-04 wafer handler includes an 8-station cassette shuttle system that provides precise motion control to successfully move wafers between the cassette and the integrated spinner. This transport unit allows accurate and consistent positioning. The spinner integrated into BROOKS AUTOMATION 002-9400-04 is designed for high-precision wafer alignment and placement during loading and unloading operations. The wafer handler can automatically align the wafer based on fiducial marks, and after alignment, can automatically transfer the wafer with precise orientation. 002-9400-04 features advanced safety measures to protect the integrity of the wafer handling process. A light curtain placed around the spinner can detect personnel entering the vicinity and will automatically activate the spinner stopper, ensuring the spinner stops rotating if someone tries to enter the wafer loading/unloading zone. In addition, the wafer handler includes a vision inspection machine which is capable of detecting foreign particles and scratches on the wafer before and after transfer. In terms of performance, BROOKS AUTOMATION 002-9400-04 wafer handler is designed to accommodate a wide range of user requirements. This tool provides users with flexibility to customise settings such as wafer size, handling speed, and operation time, allowing for quick and efficient wafer loading/unloading operations. The wafer handler also comes with a range of diagnostics and remote control capabilities for easier and more efficient asset operations. Overall, 002-9400-04 wafer handler is an automated model that provides precise and efficient transfer of multiple high-volume wafers. The integrated spinner, transport equipment, safety features, and performance capabilities ensure that wafers are accurately and reliably handled for high-volume production.