Used BROOKS AUTOMATION 003-5000-11 #9149716 for sale

BROOKS AUTOMATION 003-5000-11 is an advanced wafer handler designed for use in labs and research facilities where precise handling of semiconductor wafers is paramount. This automated handler is capable of handling 200mm to 300mm wafers with an integrated hot edge and cold wall vacuum design. The wafer handler is controlled by a user-friendly, touchscreen UI and is equipped with a 4-axis robot arm. This robot arm has a 50mm range of motion and can carry up to a maximum of 25kg of material. 003-5000-11 is built with motion sensors and high-precision linear motion stages for low-noise and stable substrate transfer. The linear motion stages have variable speed control and feature a maximum speed of 200rpm with a resolution better than 0.1 microns. The wafer handler also features a Fully Automated Pre-Alignment Stage (FAPS) for precise substrate placement. The FAPS uses two 1.8" CCD cameras with On-Axis and Off-Axis illumination for accurate alignment. In addition to the main wafer handling feature, BROOKS AUTOMATION 003-5000-11 is engineered with multiple safety features and interlocks to prevent accidental operation. It has integrated pre- and post-process parts and tooling, along with electro-magnetic interference (EMI) filters, and manual emergency stop buttons. Furthermore, the wafer handler is designed to minimise cleaning needs by incorporating a semi-sealed aesthetic design. 003-5000-11 is designed to work with a variety of processing techniques such as etching, lithography, dicing, and wafer bonding. It has a working temperature range of 4-60°C and a relative humidity range of 30-95%, allowing the handler to be used in a range of environments. Overall, BROOKS AUTOMATION 003-5000-11 is an excellent wafer handler for all wafer processing needs. It is reliable and precise with a range of safety features, allowing researchers and engineers to perform their jobs with accuracy and confidence. With its highly customizable software and integrated touch screen control, 003-5000-11 is the ideal choice for automated wafer handling.