Used BROOKS AUTOMATION 02110-BA24-AJY1 003-9300-78 #9204645 for sale

ID: 9204645
Backbone transfer module.
BROOKS AUTOMATION 02110-BA24-AJY1 003-9300-78 is a wafer handler, designed to easily and efficiently move semiconductor substrates between processing, testing and metrology stations. Its rigid construction and precision components, such as linear bearings, ball screws, and rotary and linear actuators, ensure smooth and reliable wafer handling performance. The equipment is provided with interface logic, safety interlocks, and precision motion control, making it easy to integrate into the user's existing production environment. This wafer handler has a wide range of functional capabilities and options. It allows for automated, semi-automated, or manual operation, as well as load and unload options from cassettes, FOUP's, and FOSB's. Its interface logic supports bi-directional communications, system diagnostics and data logging, and a wide range of external drivers for vacuum, blade, cooling, and vision systems. The wafer handler is designed with safety features such as pressure relief valves, safety interlocks and safety barriers, as well as electro-magnetic shielding, to protect the device and environment. The wafer handler is designed to work with a range of substrate sizes, including 200mm and 300mm substrates. Its load capacity is 120KG and its load height range is 150mm to 1150mm. The device is equipped with advanced motion control technology, which allows for move velocities of up to 200mm/s. It also supports high precision motion and accuracy, with repeatability at 0.008mm. This wafer handler is designed with energy efficient components, including brushless servo motors, belt drives, and high efficiency switching regulators, to ensure high performance and reduced energy costs. The device is designed for long term performance, and its maintenance requirements are minimal. It is provided with intelligent monitoring of all unit components, which ensures that any potential maintenance requirements can be identified before they become a problem. The wafer handler also features a reliable and user-friendly operating machine, which simplifies setup and programming of the device. It supports a wide range of configurable parameters, including acceleration, deceleration, speed, start and stop positions, and step and repeat operations. This makes it easy to customize the device to meet the user's specific needs. Overall, 02110-BA24-AJY1 003-9300-78 wafer handler is an excellent device for automating the handling of semiconductor substrates. Its high performance motion control technology, advanced safety features, long term reliability and simple setup make it an ideal choice for any automated manufacturing environment.
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