Used BROOKS AUTOMATION 121655 #9232807 for sale
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BROOKS AUTOMATION 121-655 is a wafer handling equipment designed for efficient wafer transport and dispensing. It can be used to transport and dispense up to four 8-inch wafers at once. This system is mainly used in semiconductor fabrication and test laboratories, as well as in tools in various research institutes. The unit is equipped with interchangeable modules, allowing customization according to user needs. The modules included are an adjustable open load/unload chamber, wafer transport and latching, wafer storage capacity, and precision metrology components. This wafer handler has multiple air bearing-based axes for high-performance operation, and is compatible with a variety of wafer-handling equipment. The machine has two major components namely, an automated Open-Load/Unload chamber and a motion control tool. The former provides precise, high accuracy, and quick loading/unloading of wafers from semiconductor tools. It also includes a asset for precisely positioning wafers in the operation chamber before and after operations. The motion control model includes a wafer-exchange mechanism and a die-positioning equipment that enables up to four 8-inch wafers to rotate in a drum-type configuration in order to reduce loading/unloading time. The wafer handling system also features a flexible vacuum wafer handling unit, a temperature control machine, and the capability to enable low-contact plasma process. This wafer handling tool has a unique feature that enables wafers to be transferred between different types of tools with precision and accuracy. This helps users reduce the time and energy costs associated with wafer transport and storage. 121-655 is a reliable and efficient wafer handling asset that meets all user requirements. It is highly compact and energy efficient, which ensures it consumes minimal space. In addition, the model is built using durable and high-quality components and robust, user-friendly software that is easy to use and operate. This equipment has been manufactured in compliance with the highest quality and safety standards.
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