Used BROOKS AUTOMATION 143668 #9254402 for sale
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BROOKS AUTOMATION 143668 is a wafer handler that is designed to move semiconductors through a processing line quickly and efficiently. Utilizing a high torque multiple-axis motion, 143668 wafer handler can convey substrates up to six-inches (150mm) in diameter over long, straight sections or around curves with no additional hardware. BROOKS AUTOMATION 143668 is also capable of accurately controlling the temperature of heated wafer chucks or cold plates using a range of 3°C to 40°C. The unit comes standard with programmable logic controllers that allow operators to configure and run different workflows. 143668 is equipped with three independent motion axes and a load capacity of up to 7 kilograms. Two vertical axes move the wafer handling arm up and down while the third axis moves it among substrate carriers. It is truly a multi-axis equipment that can make 3-D motions. The arm has a maximum stroke of 417 mm and a cycle time as fast as 8 seconds. BROOKS AUTOMATION 143668 wafer handler is designed for safety, battery-free operation, easy integration, and process reliability. The unit comes with an Easy EDM software package for easy programming and operation. The EDM software allows operators to create customer-defined workflows specific to an individual process. Power is provided directly from an external AC line, eliminating the need for cumbersome battery replacement. The unit also features an advanced electronic monitoring system that provides real-time feedback about 143668's performance and condition. BROOKS AUTOMATION 143668 wafer handler has many features to maximize process efficiency and reliability. An integrated haptic feedback unit provides real-time information to the EDM software regarding wafer alignment. This provides operators with precise control over the position of a substrate, minimizing misalignment related flaws. The haptic feedback machine is also capable of providing information about the progress of a wafer as it is moved from station to station. 143668 is a powerful and reliable wafer handler for all process needs. Its high torque multiple-axis motion allows for efficient substrate movement along curved or straight paths. It comes with an Easy EDM software package and a haptic feedback tool for precision wafer alignment. Power is provided directly form an external AC line, eliminating the need for cumbersome battery replacement. The unit also comes with a range of temperature control options, making it suitable for a variety of temperatures. With its features and capabilities, BROOKS AUTOMATION 143668 wafer handler is an ideal choice for any substrate process.
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