Used BROOKS AUTOMATION 162386 #293665805 for sale

BROOKS AUTOMATION 162386 is a wafer handler module designed to securely transport wafers between processing stages in a wafer fabrication line. The module is designed to provide maximum efficiency and accuracy by utilizing various technologies, such as micro-stepping motors, optical encoders, and drive circuitry. The wafer handler utilizes motor-driven axes and conveyors to move wafers and their carrier into, out of, and around the processing chambers. The robot is controlled through a control panel which accepts commands from a computer-based control equipment. This control system can be programmed for specific task automation, such as dose or thermal uniformity control. The optical encoders are used to monitor the speed, direction and position of the moving parts. A micro-stepping motor is used to provide precise motion and positioning, enabling the robot to precisely deposit materials in the processing chambers. The drive circuitry monitors the motors' current and voltage and allows the robot to be operated in a safe and reliable manner. 162386 has the capability to interface with other robots in the factory as well as with various process controls, such as the wafer load locks and robotic transport unit. With its built-in communication capabilities, the wafer handler can be connected to other systems in order to collect data for analysis and optimization. In addition, the robot can be used to access parts of the processing line which are closed or otherwise inaccessible to humans. The wafer handler has been designed to be safe and reliable for use in a variety of wafer processing environments. Its construction includes chemical-resistant components as well as a range of sensors and alarms to detect any dangerous conditions. Safe operation of the robot is ensured by built-in safety features. BROOKS AUTOMATION 162386 wafer handler is an extremely reliable and versatile machine designed for the safe and efficient handling of wafers. Its ability to process a variety of materials and interface with other robots and production lines enables it to be used in a wide range of applications. The robot's design incorporates the latest in automation technology to ensure its safety, reliability, and accuracy.