Used BROOKS AUTOMATION 199630-0001 #293670619 for sale

ID: 293670619
Razor robot.
BROOKS AUTOMATION 199630-0001 wafer handler is a versatile, multiple-chamber design accommodating various wafers sizes,from 100mm up to 300mm .The advanced wafer handler design permits superior performance when handling wafers of different diameters, making it an ideal solution for silicon wafer manufacturing and processing.The chamber body and lid are constructed of heavy-duty corrosion-resistant stainless steel, and the frame is made of welded aluminum extrusions. 199630-0001 design features an encoder-controlled, wrap-around belt system which reduces material bouncing and provides a consistent, smooth wafer transfer between the process chambers. The belt's motion is assymetric, ensuring that the wafers move without contact or interference with other components and materials in the chamber. The drive can be adjusted to enable optimal belt speed and acceleration for a variety of wafer sizes. The interior components of BROOKS AUTOMATION 199630-0001 are enclosed in a hermetically sealed environment, ensuring a clean, dry processing environment. Airflow through the chamber is controlled by an adjustable fan system with electronic fan speed adjustment capability, and the exhaust is integrated with a filter. This optimized environment reduces sublimation and condensation of material on the wafers. The wafer handler is monitored and controlled via USB-linked PC software. If an error is detected, an error code is displayed and the chamber stops before the issue occurs, reducing the likelihood of damage to the wafers. The software is designed for ease of use, with a user-friendly graphical user interface and automated set-up routines. 199630-0001 is an efficient, reliable, and economical wafer handling system. It is designed for optimum performance and complete environmental control for processes such as backside contact opening, PH3 deposition, and conductive or dielectric sputter deposition. The multiple chamber design can easily accommodate various wafer sizes, and the adjustable fan speed and controlled environment ensure clean, safe handling of the wafers. The software provides easy operational control with automated set-up routines and error-detection capabilities. This highly reliable, precision wafer handler is an ideal choice for silicon wafer fabricators and other applications requiring careful, accurate wafer handling.
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