Used BROOKS AUTOMATION ATR-8 #9064554 for sale

BROOKS AUTOMATION ATR-8 is an industry-standard wafer handler designed to reliably transport and exchange wafers in vacuum- and pressure-controlled environments. The equipment features a high-speed, front-end wafer-handling robot to precisely handle and transfer up to 8 parallel wafers at 25 wafers per second. The robot arm beam is driven by a high-torque, direct drive motor for smooth and accurate motion. The system also includes an BROOKS AUTOMATION ATR8 compact process chamber, which can quickly evacuate to create low-pressure environments. ATR-8 also features a consistent, reliable seal between the wafer handling robot and the process chamber, offering high-quality and repeatable results. The unit is equipped with robust electronic feedback that allows the operator to monitor and adjust the robot arm's speed as needed. Additionally, ATR8 is compatible with most standard wafer formats, allowing for easy interchangeability. BROOKS AUTOMATION ATR-8 comes with a variety of advanced features to ensure a safe and efficient wafer handling process. These features include an electromechanical brake machine to engage the robot arms and provide secure handling of wafers. The tool also features the most advanced safety interlock systems, card readers, and visual recognition technology to ensure operator safety while handling delicate wafers. Additionally, the asset is equipped with several sensors to detect heat or chemical levels in the process chamber. BROOKS AUTOMATION ATR8 also includes an advanced process control model that monitors parameters such as wafer temperature, gas levels, chamber pressure and flow rate. This feature allows operators to quickly and accurately analyze, adjust, and optimize wafer processing conditions. Overall, ATR-8 is an efficient and reliable equipment for handling and transporting wafers in vacuum and pressure environments. The combination of advanced safety features, robust electronic feedback systems, and process control capabilities make it ideal for critical wafer handling applications.