Used BROOKS AUTOMATION Backbone-VTS #9281505 for sale

BROOKS AUTOMATION Backbone-VTS is an advanced wafer handler designed for high precision, high speed automated wafer handling. The equipment is capable of processing in a variety of wafer sizes, from 8 inch to 12 inch wafers. With its robust design and robust components, the system is able to achieve high throughput and reliability. Backbone-VTS utilizes robotic arms with reliable wafer motion control designed to maintain extreme precision. Each arm is securely mounted to its support structure and operated through a comprehensive set of controls. The unit uses Solid-state DC servo controllers for the wafer-carrier motor movement. The controller allows quick and accurate changes in motion speed over a wide range of wafer sizes, movements, and locations. The machine features two independent, high-torque stepping motors capable of sub-micron positioning and resolution for precise wafer-to-handler alignment and control. Alongside the mechanical components, the tool also includes an intelligent control asset. The model includes various sensors that detect the size and orientation of the wafers as well as measuring environmental conditions inside the cassette. The controller is programmed to control the movements of the robot arm, run wafer transportation routines, coordinate multiple wafer transfers, and keep track of wafer location and status. The controller is also capable of recognizing errors and automatically initiating corrective action. BROOKS AUTOMATION Backbone-VTS features a comprehensive equipment architecture designed to provide outstanding performance. Its modular design allows users to customize the system to meet their specific needs. The unit includes a wide range of software packages, such as high-speed handler management software and full-featured handler debugging software. The machine also supports different types of industry protocols, allowing for direct integration of the machine with other devices. Backbone-VTS is one of the most capable and efficient wafer handlers available. Its robust and reliable design, precise wafer-to-handler alignment, and comprehensive software packages make it an ideal choice for applications requiring high throughput, high precision, and high reliability. With its comprehensive features and performance, it is the perfect solution for automated wafer handling needs.