Used BROOKS AUTOMATION Backbone #9294028 for sale

BROOKS AUTOMATION Backbone is a wafer handler is a type of scientific instrument used by semiconductor manufacturers for transferring and processing semiconductor wafers. The main purpose of the wafer handler is to automate the wafer transportation and processing, from one stage of fabrication to the next, with minimal manual intervention. Backbone is a fully automated wafer handling equipment designed to enable the transportation of semiconductor wafers among processing steps, and the storage of wafers during extended processing runs. At its core, BROOKS AUTOMATION Backbone is composed of a series of transport mechanisms and chamber modules used to transit and store wafers during fabrication processes. The transport mechanisms are used to move wafers from the input modules to the specified processing modules, while the chamber modules act as materialization points within the system. Each module is designed to maintain a specific pressure, temperature, environment, and cleanliness requirements, such as dynamic cleaning or pre-conditioning of the atmosphere for delicate processes. Backbone is also equipped with sensors to measure the conditions of the unit, such as pressure and temperature. To ensure accurate and safe delivery, BROOKS AUTOMATION Backbone is designed with advanced motion control systems that provide precision control as well as safety measures. This is necessary for wafer carriers to be certain they are moving accurately and in the right direction, that there is no contact between carriers, and that the carriers are handling wafers carefully without any damage. Backbone also supports various types of wafer carriers such as 200mm, 300mm, tappered, and other custom sizes. Carriers suitable for high temperature processes are also available. The machine also enables easy adjustments and modifications via software for different wafer sizes. Overall, BROOKS AUTOMATION Backbone represents a reliable and sophisticated wafer handling tool that offers secure, precise and efficient transportation and storage of wafers. It simplifies manual handling and enables repeatable furnace processes with controllable vacuum, as well as precise movement of wafers through these process steps. It is a leading option for a wide range of wafer handling applications, from high volume production to R&D.