Used BROOKS AUTOMATION E40001182 and E19013780 #57120 for sale
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ID: 57120
Wafer Size: 12"
Lot of 2 fixloads
For the VARIAN VIISion / VIISta systems
Fixload 25/V5, 12"
Brooks Fixload V6 Loadport, 12"
Crated.
BROOKS AUTOMATION E40001182 EChanger and the E19013780 EChanger are two wafer handlers specifically designed for semiconductor and optoelectronic device processing. These high-performance machines offer automatic wafer handling, thermal management, and inspection capabilities for maximum throughput and improved device yields. The EChanger is designed to move a wafer from its storage location to the processing station. The machine's main components include a main frame, servomotor, drive unit, and shuttles. The main frame consists of two main supports and a central frame that house the servomotor, drive unit, and other components. The servomotors are responsible for the alignment, translation, and rotation of the shuttles and associated tooling. The drive unit consists of a motor, gearbox, and a controller that is responsible for the synchronization, timing, and control of the equipment. The EChanger can transport a variety of wafer sizes and weights through a range of motion patterns. The machine utilizes precision motion scribing, thermal energy profilers, and scan field adjustment to ensure accurate wafer handling. The machine is designed to maintain wafer flatness, handle cassettes of up to 200+ wafers, and provide real-time thermal management during processing. The EChanger is constructed with safety features for a secure working environment. It has a safety interlock system to protect against accidental activation of the shuttles and is also equipped with emergency stop buttons in the event of an emergency or user error. It also has an emergency power-off switch to shut down the unit in an emergency. The EChanger also has dust and moisture protection to ensure a clean operational environment. In addition to the EChanger's wafer hand-over capabilities, the E19013780 EChanger is equipped with an inspection station that allows operators to view the wafer and inspect the condition of the device. This includes a high precision CCD camera, onboard lighting machine, and three advance image processing technologies: Ultra Clear, Contrast Protection, and Dual Image Trace. These features provide a higher level of accuracy and repeatability for accurate yield analysis and device characterization. BROOKS AUTOMATION EChanger's offers a reliable and efficient wafer handling solution. Thanks to its features such as the servomotors, drive unit, and precision motion scribing technology, it allows for maximum throughput and precise alignment of the wafer. It is also equipped with other features including an inspection station and real-time thermal management capabilities that make it ideal for semiconductor and optoelectronic device processing.
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