Used BROOKS AUTOMATİON EFEM #9358219 for sale

ID: 9358219
Vintage: 2014
Systems Part number: 241181-0004 Jet: (3) Wide with Reliance vacuum grip 3-Axis Reliance ATM Robot EE Vacuum grip for 8"-12" ATR Series 8 Aligner, 8"-12" With notch Rear panel fit for GX VBE Loadlocks (2) Vision LPMs Loadports 2014 vintage.
BROOKS AUTOMATİON EFEM is a high-performance wafer handler designed to precisely and quickly move and handle delicate wafers and components in a wide range of factory automation and material handling applications. It is a versatile, high-throughput machine that allows wafers to be moved between different processes in a controlled and safe manner. The Brooks EFEM wafer handler is a modular automated equipment composed of servo motors, motion controllers, robot arms, manual transfer carts, or any combination of these to control the wafer movement. The robot arm is the key component of the system and is configured to work with specific application requirements. This flexible unit allows for a variety of wafer handling configurations that cover a wide array of applications including precision wafer handling and transfer, assembly operations, machine tending, and semiconductor fabrication. The robot arm is designed to handle wafers up to 450mm in diameter. It is equipped with a radial actuator that precisely controls the angular orientation of the wafer relative to the arm and BROOKS AUTOMATİON EFEM's base. This design allows for high-precision angles that are consistent when moving and handling wafers between different special processes. The robot arm also features an integrated wafer chucking machine and, for optimized performance, a "start-stop" operation which allows the robot arm to be stopped and its state memory to accurately position the wafer as per the application necessities. The robot is combined with a camera for vision guidance and precise wafer alignment. The Brooks EFEM is capable of accurately transferring wafers between processes up to speed of 300mm/sec. It also has a standard command set to control the operation of the robot and/or its accessories. Its high precision and speed reduce wafer handling time and its intuitive control program ensures accuracy. The Brooks BROOKS AUTOMATİON EFEM is one of the most reliable wafer handling systems in the market today due to its high performance components and quality construction. In conclusion, EFEM is an effective wafer handler that is designed to precisely and quickly move and handle delicate wafers and components in a wide range of factory automation and material handling applications. Its modular design and flexibility makes it much more conducive for applications involving highly precise angles and movements. It is also one of the most reliable wafer handling systems in the market today due to its high-performance components and construction. It is an ideal tool for meeting the needs of most automated factory environments.
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