Used BROOKS AUTOMATION FabExpress #293798433 for sale

BROOKS AUTOMATION FabExpress wafer handler is an automated transfer module specifically designed for the semiconductor industry. It is used to move wafers between processing equipment, such as lithography tools, CVD tools, etchers, and wet benches, during the semiconductor fabrication process. The wafer handler is capable of transferring wafers up to 200 mm in diameter at a rate of up to 12 wafers per hour. It can be operated at pressure or vacuum levels to maintain tight process control over wafer handling. FabExpress features a high-precision wafer dicing module that is designed to provide reliable performance for wafer handling. The dicing module allows for accurate fine-tune adjustments that enable precise transfers of wafers. This module also has a high-speed camera equipment and a built-in laser detection system to ensure accuracy of the dicing process. A programmable vision unit is provided which simplifies the setup and operation of the wafer handler. BROOKS AUTOMATION FabExpress wafer handler utilizes a combination of servomotor and pneumatic actuators to quickly and accurately transfer wafers between processing equipment. It also includes a motion control unit with programmable logic controllers (PLCs) to provide precise motion control. The motion control unit can be used to synchronize multiple processes to provide efficient operation. This wafer handler is equipped with precision optical mechanical systems to ensure accurate, non-overlapping transfers of the wafers. It has an integrated vacuum chamber that can precisely manipulate the wafers in the chamber. This vacuum chamber is designed with an integrated robotic arm for precise handling and repeatability. The wafer handler comes with an automated vision machine for wafer inspection which surpasses most automated wafer handling machines on the market. It has a wide range of available inspection options, including in-situ vision inspection, which allows the operator to confirm wafer quality without having to remove them from the tool. FabExpress is a highly reliable wafer handler that provides excellent handling accuracy and repeatability. It has advanced safety features such as sensors and interlocks for maximum process control and reliability. This wafer handler is designed to operate 24/7 with minimal downtime. It also comes with service, maintenance and parts packages to ensure optimal performance with minimal disruption.