Used BROOKS AUTOMATION Fixload 6M #293635521 for sale

ID: 293635521
Vintage: 2005
Load ports P/N: 013096-081-20 2005 vintage.
BROOKS AUTOMATION Fixload 6M is a wafer handler designed to facilitate high-yield processing of unit-sized wafers in semiconductor manufacturing. This versatile, single-cassette, multiple in-vial wafer handler is specifically designed to provide minimal load-lock and robot transitions for seamless, efficient throughput. Fixload 6M integrates a high-speed dual axis robot, precise micro-valve positioners, and an optimized double-end vial gripper. The robot and gripper both have circular trajectories that take wide turns to minimize robot position time and maximize robot availability to other processes. The robot is designed to move wafers from wafer cassettes to load locks, in-vials, or other processing stages with aseptic operation and a small foot print. The micro-valve positioners work independently of the robot, keeping their flexible nozzles precisely on the target to reduce workload. This integrated system enables high-throughput operation with minimal handling errors. The machine boasts a full suite of interface options, compatible with a wide range of process equipment. BROOKS AUTOMATION Fixload 6M has the capability to integrate with existing equipment of different makes, as well as with BROOKS AUTOMATION full suite of advanced technologies. The easy-to-use motion planning software also ensures that automation, maintenance, and monitoring all occur with minimal human intervention. Fixload 6M's integrated design results in faster and more consistent wafer processing. The optimized double-end vial gripper efficiently transmits multiple wafers of various sizes and locations without errors, while the parallel movement of robot and micro-valve positioner deliver improved accuracy and reliability. This, coupled with the minimal load-lock and robot transitions, results in smooth and error-free processing. BROOKS AUTOMATION Fixload 6M is equipped with multiple safety features for long-term reliability. The multiple safety systems included provide protection for both the machine operator and the robot, thereby reducing the risk of damage and injury. Additionally, the machine has multiple built-in diagnostic features, providing quick and accurate troubleshooting to maximize up-time and reduce overall system downtime. Fixload 6M is ideal for semiconductor facilities looking to improve production yield, reduce cost, and increase safety. With its advanced design, integrated technology, and versatile interface options, this wafer handler is the ideal choice for facilities looking to achieve a high-level of excellence.
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