Used BROOKS AUTOMATION Fixload 6M #293800213 for sale

BROOKS AUTOMATION Fixload 6M is an advanced robot-based single-wafer handler designed to provide reliable, efficient wafer transfer between process tools. It is an ideal solution for handling and transferring all wafer types between various wafer processing processes, such as etching, lithography, and deposition. Fixload 6M is fully automated and works in tandem with several process tools. It can handle a wide range of substrate sizes, ranging from two inches to 12 inches in diameter. BROOKS AUTOMATION Fixload 6M utilizes a dual-arm robotic mechanism with an end-effector to transfer wafers in a vacuum-enclosed wafer pickup environment. It also features an anodized aluminum frame for superior thermal and vibration stability, reducing shock and vibration effects to ensure accuracy and repeatability. The main motor drive of the robot is powered by a servo controller, allowing the robot to accurately control the movement and rotation of the robot arm. Fixload 6M is equipped with a resolution-controlled vision equipment which allows it to precisely locate and target objects. The vision system has been optimized to minimize mis-load statistics and re-target misloads quickly. It also enables wafer sorting to reduce contamination. The unit also features autodiscrete point scan and line scan technologies which detect pinholes, surface imperfections, and particle contamination on the surface of the wafer. BROOKS AUTOMATION Fixload 6M provides superior throughput speed and accuracy without sacrificing quality control. Its auto-cleaning capabilities and onboard power management ensures transfer of high quality clean wafers. Its comprehensive data tracking and reporting machine logs key measurements to ensure traceability which helps in process troubleshooting. In addition, Fixload 6M provides various user-friendly features such as clear part tracking and real-time alarming for consumables such as gas cylinders and particle traps. The software allows users to quickly program changes, set up recipes, and develop customizable factory reports. The service center offers repairs and maintenance services, ensuring that BROOKS AUTOMATION Fixload 6M performs as expected. Overall, Fixload 6M is an advanced, reliable, and efficient wafer handler optimized to provide consistent performance with low mis-load statistics and excellent throughput and quality. Its robust features and design make BROOKS AUTOMATION Fixload 6M a best-in-class solution for the semiconductor industry.