Used BROOKS AUTOMATION Fixload V6 #293634036 for sale

ID: 293634036
Wafer Size: 12"
Vintage: 2003
Load port, 12" 2003 vintage.
BROOKS AUTOMATION Fixload V6 is a wafer handler designed to automate wafer loading and unloading in batch semiconductor manufacturing processes. It allows for efficient and semi-automated loading and unloading of wafers in a single process. This allows for large numbers of wafers to be processed in a single run and reduces the process time. Fixload V6 uses a Flexible Pod Equipment that can accommodate a variety of wafer sizes, including 6-inch and 8-inch round wafers. The flexible pod system is designed to be compatible with other systems, such as wafer handling systems, and is easily configurable, allowing for specific wafer sizes to be handled. The unit uses an integrated Vacuum Wafer Transfer Machine to transfer wafers into and out of processing platforms and Positioning and Orientation Systems to accurately align wafers for processing. In addition, the tool can be configured to automatically detect misalignment and abort the process, preventing damage to the wafers and processing equipment. BROOKS AUTOMATION Fixload V6 has a high-efficiency process controller with a full-featured graphic interface to ensure smooth and safe operation of all wafer processes. The controller can be used to control multiple wafer processing tasks such as wafer cooling, baking, and oxidizing, as well as to monitor process variables. The asset can also be configured to automatically adjust process parameters based on the results of measurements made during processing. This is intended to optimize processing conditions and prevent any damage to the wafers due to non-optimal conditions. Fixload V6 has a secure design to protect the model and the wafers against contamination and other environmental factors. It has a secure access equipment and a built-in interlock system to prevent accidental unit malfunctions. In addition, BROOKS AUTOMATION Fixload V6 includes traceability systems to monitor and record all process events and detect any errors. This is intended to allow for easier debugging and troubleshooting of the machine should any issues occur. Fixload V6 is a user-friendly and reliable wafer handler tool. It has been designed to improve the efficiency and productivity of wafer processing in semiconductor manufacturing processes.
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